Publications

2 results for E.N. Levine

Integration of copper and fluorosilicate glass for 0.18 μm interconnections
- - E. Barth
  - T. Ivers
  - et al.
- 2000
- IITC 2000
Effect of contact implants on the patterning of tungsten damascene interconnects
- - J.P. Gambino
  - M.A. Jaso
  - et al.
- 1996
- MRS Spring Meeting 1996