High density plasma etching of NiFe, NiFeCo and NiMnSb-based multilayers for magnetic storage elementsK.B. JungJ. Honget al.1999Applied Surface Science
Interhalogen plasma chemistries for dry etch patterning of Ni, Fe, NiFe and NiFeCo thin filmsH. ChoK.B. Junget al.1999Applied Surface Science