Publications

3 results for J.L. Hurd

The microstructure of submicrometer wide planar-reactive ion etched versus trench-damascene AlCu lines
- - K.P. Rodbell
  - L. Gignac
  - et al.
- 2000
- Journal of Applied Physics
Linewidth and underlayer influence on texture in submicrometer-wide Al and AlCu lines
- - J.L. Hurd
  - K.P. Rodbell
  - et al.
- 1998
- Applied Physics Letters
Blanket and local crystallographic texture determination in layered Al metallization
- - K.P. Rodbell
  - J.L. Hurd
  - et al.
- 1995
- MRS Fall Meeting 1995