Processing and modeling options for advanced thin film magnetoresistive head structures
- R.E. Fontana Jr.
- M.L. Williams
- et al.
- 1999
- INTERMAG 1999
Publications
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6 results for R. Hsiao
Plasma-induced surface segregation and oxidation in nickel-iron thin films
- R. Hsiao
- D. Mauri
- 2000
- Applied Surface Science
Titanium carbide etching in high density plasma
- R. Hsiao
- D.C. Miller
- et al.
- 1999
- Applied Surface Science
Si/SiO2 etching in high density SF6/CHF3/O2 plasma
- R. Hsiao
- J. Carr
- 1998
- Materials Science and Engineering B
Anisotropic etching of a novalak-based polymer at cryogenic temperature
- R. Hsiao
- K. Yu
- et al.
- 1997
- JES
Etching of tantalum in fluorine-containing high density plasmas
- R. Hsiao
- D.C. Miller
- 1996
- JES