Microfabrication and parallel operation of 5×5 2D AFM cantilever arrays for data storage and imaging
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1998
- MEMS 1998
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5 results for C. Andreoli
A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors
- H.P. Lang
- R. Berger
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices
- J. Brugger
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
5×5 2D AFM cantilever arrays a first step towards a Terabit storage device
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1999
- Sensors and Actuators, A: Physical
Sequential position readout from arrays of micromechanical cantilever sensors
- H.P. Lang
- R. Berger
- et al.
- 1998
- Applied Physics Letters