High chi block copolymer DSA to improve pattern quality for FinFET device fabrication
- Hsinyu Tsai
- Hiroyuki Miyazoe
- et al.
- 2016
- SPIE Advanced Lithography 2016
Publications
Date
Featured collections
Popular topics
54 results for Teddie P. Magbitang
Synthesis and thin-film self-assembly of cylinder-forming high- χ block copolymers
- Ankit Vora
- Gabriela Alva
- et al.
- 2016
- J. Photopolym. Sci. Tech.
Fundamental limits of material toughening in molecularly confined polymers
- Scott G. Isaacson
- Krystelle Lionti
- et al.
- 2015
- Nature Materials
Synthesis and characterization of polycarbonate-containing all-organic High-χ block copolymers for directed self-assembly
- Ankit Vora
- Anindarupa Chunder
- et al.
- 2015
- J. Photopolym. Sci. Tech.
The efficacy of post porosity plasma protection against vacuum-ultraviolet damage in porous low-k materials
- Krystelle Lionti
- M. Darnon
- et al.
- 2015
- Journal of Applied Physics
Toward successful integration of porous low-k materials: Strategies addressing plasma damage
- Krystelle Lionti
- Willi Volksen
- et al.
- 2014
- ECS J. Solid State Sci. Technol.
Hybrid low dielectric constant thin films for microelectronics
- Willi Volksen
- Krystelle Lionti
- et al.
- 2014
- Scripta Materialia
Investigation of plasma etch damage to porous oxycarbosilane ultra low-k dielectric
- Robert Bruce
- Sebastian Engelmann
- et al.
- 2013
- Journal of Physics D: Applied Physics
Post Porosity Plasma Protection applied to a wide range of ultra low-k materials
- Theo Frot
- Willi Volksen
- et al.
- 2012
- IITC 2012
Post porosity plasma protection: Scaling of efficiency with porosity
- Theo Frot
- Willi Volksen
- et al.
- 2012
- Advanced Functional Materials