Batch-fabricated milli-actuators
- L.-S. Fan
- L.H. Lane
- et al.
- 1993
- MEMS 1993
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22 results for Long-Sheng Fan
Dual-stage servo controller for HDD using MEMS microactuator
- Tetsuo Semba
- Toshiki Hirano
- et al.
- 1999
- IEEE Transactions on Magnetics
High-bandwidth HDD Tracking Servo by a Moving-slider Micro-actuator
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1999
- IEEE Transactions on Magnetics
Electrostatic microactuator and design considerations for HDD applications
- L.-S. Fan
- T. Hirano
- et al.
- 1999
- IEEE Transactions on Magnetics
High-bandwidth high-accuracy rotary microactuators for magnetic hard disk drive tracking servos
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- IEEE/ASME TMECH
MEMS milliactuator for hard-disk-drive tracking servo
- Toshiki Hirano
- Long-Sheng Fan
- et al.
- 1998
- JMEMS
6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips
- Robert P. Ried
- H. Jonathon Mamin
- et al.
- 1997
- JMEMS
Anisotropic etching of a novalak-based polymer at cryogenic temperature
- R. Hsiao
- K. Yu
- et al.
- 1997
- JES
Design and fabrication of microactuators for high density data storage
- Long-Sheng Fan
- 1996
- IEEE Transactions on Magnetics
Integrated multilayer high aspect ratio milliactuators
- L.-S. Fan
- S.J. Woodman
- et al.
- 1995
- Sensors and Actuators: A. Physical