6-MHz 2-N/m piezoresistive atomic-force-microscope cantilevers with INCISIVE tips
- Robert P. Ried
- H. Jonathon Mamin
- et al.
- 1997
- JMEMS
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22 results for Long-Sheng Fan
High aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997
5 MHz, 2 N/m piezoresistive cantilevers with INCISIVE tips
- R.P. Ried
- H.J. Mamin
- et al.
- 1997
- TRANSDUCERS 1997
Anisotropic etching of a novalak-based polymer at cryogenic temperature
- R. Hsiao
- K. Yu
- et al.
- 1997
- JES
Design and fabrication of microactuators for high density data storage
- Long-Sheng Fan
- 1996
- IEEE Transactions on Magnetics
Invar electrodeposition for MEMS application
- T. Hirano
- L.-S. Fan
- 1996
- SPIE Micromachining and Microfabrication 1996
MICROFILE - a one-inch disk drive technology demonstration
- T.C. Reiley
- T.R. Albrecht
- et al.
- 1996
- INVMTC 1996
Integrated multilayer high aspect ratio milliactuators
- L.-S. Fan
- S.J. Woodman
- et al.
- 1995
- Sensors and Actuators: A. Physical
Tip-based data storage using micromechanical cantilevers
- H.J. Mamin
- L.-S. Fan
- et al.
- 1995
- Sensors and Actuators: A. Physical
Micromechanics applications in data storage
- L.-S. Fan
- H.J. Mamin
- 1995
- Smart Structures and Materials 1995