Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
- L. Dellmann
- S. Roth
- et al.
- 1998
- Microsystem Technologies
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2 results for G.-A. Racine
Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
- Laurent Dellmann
- Sylvian Roth
- et al.
- 1998
- Sensors and Actuators, A: Physical