Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications
- Sherif Sedky
- Paolo Fiorini
- et al.
- 1998
- JMEMS
Publications
Date
Featured collections
Popular topics
2 results for Robert Mertens
Electrical and Optical Bandgaps of GexSi1-x Strained Layers
- J.J. Loferski
- J. Nijs
- et al.
- 1993
- IEEE Transactions on Electron Devices