High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- M. Despont
- H. Lorenz
- et al.
- 1997
- MEMS 1997
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3 results for N. Fahrni
SU-8: A low-cost negative resist for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1999
- JMM
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1998
- Sensors and Actuators, A: Physical