The early history and future of the SEM
- Oliver C. Wells
- David C. Joy
- 2006
- Surface and Interface Analysis
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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2 results for David C. Joy
Applications of image diagnostics to metrology quality assurance and process control
- John A. Allgair
- Victor V. Boksha
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003