Dynamic force microscopy by means of the phase-controlled oscillator method
- U. Dürig
- H.R. Steinauer
- et al.
- 1997
- Journal of Applied Physics
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Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
- N. Blanc
- J. Brugger
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures