A conic primitive-based pattern generator for electron-beam lithography of diffractive optical elements
- H. Rothuizen
- D. Prongué
- et al.
- 1997
- Microelectronic Engineering
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Enhanced e-beam system for the fabrication of optical elements
- D. Prongue ́
- H. Rothuizen
- et al.
- 1995
- Microelectronic Engineering