Numerical simulation of etching and deposition processes
- Satoshi Hamaguchi
- Anita A. Mayo
- et al.
- 1997
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Publications
4 results for Cindy X. Wang
Insight into the dry etching of fence-free patterned platinum structures
- K.R. Milkove
- C.X. Wang
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Analysis of a fence-free platinum etch process
- Keith R. Milkove
- Cindy X. Wang
- 1997
- Integrated Ferroelectrics
A reactive ion etch study for producing patterned platinum structures
- Curtis E. Farrell
- K.R. Milkove
- et al.
- 1997
- Integrated Ferroelectrics