Analysis of a fence-free platinum etch process
- Keith R. Milkove
- Cindy X. Wang
- 1997
- Integrated Ferroelectrics
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4 results for Cindy X. Wang
Insight into the dry etching of fence-free patterned platinum structures
- K.R. Milkove
- C.X. Wang
- 1997
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A reactive ion etch study for producing patterned platinum structures
- Curtis E. Farrell
- K.R. Milkove
- et al.
- 1997
- Integrated Ferroelectrics
Numerical simulation of etching and deposition processes
- Satoshi Hamaguchi
- Anita A. Mayo
- et al.
- 1997
- Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers