Lithography beyond light: Microcontact printing with monolayer resists
- H.A. Biebuyck
- N.B. Larsen
- et al.
- 1997
- IBM J. Res. Dev
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Characterization of electron beam induced modification of thermally grown SiO2
- J.R. Barnes
- A.C.F. Hoole
- et al.
- 1995
- Applied Physics Letters