Microstructural characterization of carbon films and CNx films produced by N+ implantation
- N. Laidani
- A. Miotello
- et al.
- 1999
- Journal of Physics Condensed Matter
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Influence of nitrogen doping on different properties of a-C:H
- R. Hauert
- A. Glisenti
- et al.
- 1995
- Thin Solid Films