Ultrathin membrane, masks for electron projection lithography
- O.R. Wood II
- W.J. Trybula
- et al.
- 2004
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Soft X-ray microscope with zone plate at UVSOR
- Norio Watanabe
- S. Aoki
- et al.
- 1996
- Journal of Electron Spectroscopy and Related Phenomena