Energy density and temperature calibration for feol nanosecond laser annealing
- Yasir Sulehria
- Oleg Gluschenkov
- et al.
- 2020
- ASMC 2020
Publications
4 results for Shaoyin Chen
External Resistance Reduction by Nanosecond Laser Anneal in Si/SiGe CMOS Technology
- Oleg Gluschenkov
- Heng Wu
- et al.
- 2018
- IEDM 2018
Dual beam laser annealing for contact resistance reduction and its impact on VLSI integrated circuit variability
- Zuoguang Liu
- Oleg Gluschenkov
- et al.
- 2017
- VLSI Technology 2017
Mechanical enhancement of low- k organosilicates by laser spike annealing
- Willi Volksen
- Geraud Dubois
- et al.
- 2008
- JES