Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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4 results for Shaoyin Chen

External Resistance Reduction by Nanosecond Laser Anneal in Si/SiGe CMOS Technology
- - Oleg Gluschenkov
  - Heng Wu
  - et al.
- 2018
- IEDM 2018
Energy density and temperature calibration for feol nanosecond laser annealing
- - Yasir Sulehria
  - Oleg Gluschenkov
  - et al.
- 2020
- ASMC 2020
Dual beam laser annealing for contact resistance reduction and its impact on VLSI integrated circuit variability
- - Zuoguang Liu
  - Oleg Gluschenkov
  - et al.
- 2017
- VLSI Technology 2017
Mechanical enhancement of low- k organosilicates by laser spike annealing
- - Willi Volksen
  - Geraud Dubois
  - et al.
- 2008
- JES