Fabrication of a silicon-Pyrex-silicon stack by a.C. Anodic bonding
- M. Despont
- H. Gross
- et al.
- 1996
- Sensors and Actuators, A: Physical
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Electron-beam microcolumn fabrication and testing
- M. Despont
- U. Staufer
- et al.
- 1996
- Microelectronic Engineering