Doping profiling with scanning surface harmonic microscopy
- M. Johnson
- J.P. Bourgoin
- et al.
- 1995
- Microelectronic Engineering
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3 results for J.P. Bourgoin
Characterization of electron beam induced modification of thermally grown SiO2
- J.R. Barnes
- A.C.F. Hoole
- et al.
- 1995
- Applied Physics Letters
Semiconductor characterization with the scanning surface harmonic microscope
- J.P. Bourgoin
- M. Johnson
- et al.
- 1994
- Applied Physics Letters