Publications

2 results for Roland Schelasin

Using simulation to analyze integrated tool performance in semiconductor manufacturing
- - John Mauer
  - Roland Schelasin
- 1994
- Microelectronic Engineering
Analysis of cluster tool performance in semiconductor manufacturing
- - John L. Mauer
  - Roland E. A. Schelasin
  - et al.
- 1992
- IEMT 1992