Publications

2 results for Michael L. Passow

The Gaseous Electronics Conference radio-frequency reference cell: A defined parallel-plate radio-frequency system for experimental and theoretical studies of plasma-processing discharges
- - P.J. Hargis Jr.
  - K.E. Greenberg
  - et al.
- 1994
- Review of Scientific Instruments
Infrared absorption spectroscopy for monitoring condensible gases in chemical vapor deposition applications
- - James A. O'neill
  - Michael L. Passow
  - et al.
- 1994
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films