Atomic layer epitaxy of silicon by dichlorosilane studied with core level spectroscopy
- J.A. Yarmoff
- D.K. Shuh
- et al.
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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2 results for C.W. Lo
Chlorine chemisorption on and the onset of etching of cleaved GaAs(110) at room temperature
- D.K. Shuh
- C.W. Lo
- et al.
- 1994
- Surface Science