Dielectric damage
- H. Ren
- S. Banna
- et al.
- 2014
- ECS Transactions
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
Date
Featured collections
Popular topics
48 results for Qinghuang Lin
The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials
- M.T. Nichols
- K. Mavrakakis
- et al.
- 2013
- Journal of Applied Physics
The effects of vacuum ultraviolet radiation on low-k dielectric films
- H. Sinha
- H. Ren
- et al.
- 2012
- Journal of Applied Physics
Quantifying the elasticity and viscosity of geometrically confined polymer films via thermal wrinkling
- Edwin P. Chan
- Qinghuang Lin
- et al.
- 2012
- Journal of Polymer Science, Part B: Polymer Physics
Facile chemical rearrangement for photopatterning of POSS derivatives
- Jitendra Rathore
- Qiu Dai
- et al.
- 2011
- Journal of Materials Chemistry
Quantifying the stress relaxation modulus of polymer thin films via thermal wrinkling
- Edwin P. Chan
- Santanu Kundu
- et al.
- 2010
- ACS AMI
Integration of photo-patternable low-κ material into advanced Cu back-end-of-the-line
- Qinghuang Lin
- Alshakim Nelson
- et al.
- 2010
- Japanese Journal of Applied Physics
Thermally induced wrinkling in thin-film stacks on patterned substrates
- K. Srinivasan
- S. Goyal
- et al.
- 2009
- IBM J. Res. Dev
Low dielectric constant nanocomposite thin films based on silica nanoparticle and organic thermosets
- Qinghuang Lin
- Stephen A. Cohen
- et al.
- 2007
- Journal of Polymer Science, Part B: Polymer Physics
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- Tengjiao Hu
- Ronald L. Jones
- et al.
- 2004
- Journal of Applied Physics