Dielectric damage
- H. Ren
- S. Banna
- et al.
- 2014
- ECS Transactions
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48 results for Qinghuang Lin
The effects of plasma exposure and vacuum ultraviolet irradiation on photopatternable low-k dielectric materials
- M.T. Nichols
- K. Mavrakakis
- et al.
- 2013
- Journal of Applied Physics
The effects of vacuum ultraviolet radiation on low-k dielectric films
- H. Sinha
- H. Ren
- et al.
- 2012
- Journal of Applied Physics
Quantifying the elasticity and viscosity of geometrically confined polymer films via thermal wrinkling
- Edwin P. Chan
- Qinghuang Lin
- et al.
- 2012
- Journal of Polymer Science, Part B: Polymer Physics
Facile chemical rearrangement for photopatterning of POSS derivatives
- Jitendra Rathore
- Qiu Dai
- et al.
- 2011
- Journal of Materials Chemistry
Quantifying the stress relaxation modulus of polymer thin films via thermal wrinkling
- Edwin P. Chan
- Santanu Kundu
- et al.
- 2010
- ACS AMI
Integration of photo-patternable low-κ material into advanced Cu back-end-of-the-line
- Qinghuang Lin
- Alshakim Nelson
- et al.
- 2010
- Japanese Journal of Applied Physics
Thermally induced wrinkling in thin-film stacks on patterned substrates
- K. Srinivasan
- S. Goyal
- et al.
- 2009
- IBM J. Res. Dev
Low dielectric constant nanocomposite thin films based on silica nanoparticle and organic thermosets
- Qinghuang Lin
- Stephen A. Cohen
- et al.
- 2007
- Journal of Polymer Science, Part B: Polymer Physics
Small angle x-ray scattering metrology for sidewall angle and cross section of nanometer scale line gratings
- Tengjiao Hu
- Ronald L. Jones
- et al.
- 2004
- Journal of Applied Physics