Effect of gas impurity and ion bombardment on stresses in sputter-deposited thin films: A molecular-dynamics approach
- C.C. Fang
- F. Jones
- et al.
- 1993
- Journal of Applied Physics
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Molecular Dynamics Modeling of Microstructure and Stresses in Sputter-Deposited Thin Films
- F. Jones
- 1993
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films