The influence of silicon substrate crystallinity and doping on TiSi2 thin film morphology
- T.E. Karlin
- S. Nygren
- et al.
- 1993
- Applied Surface Science
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Electrical evaluation of high-temperature effects on gate oxide integrity in a self-aligned CoSi2 MOS process
- T.E. Karlin
- S.-L. Zhang
- et al.
- 1993
- Applied Surface Science