Study particle emission in vacuum from film deposits
- Joseph S. Logan
- James J. McGill
- 1992
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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Detection of particle traps by spatially resolved optical emission spectroscopy over grooved electrodes in radio frequency discharges
- M. Dalvie
- G.S. Selwyn
- et al.
- 1993
- Applied Physics Letters