Publications

2 results for R. S. Smith

An evaluation of Fuchs-Sondheimer and Mayadas-Shatzkes models below 14nm node wide lines
- - R. S. Smith
  - E. T. Ryan
  - et al.
- 2019
- AIP Advances
Patterning method impact on sub-36nm pitch interconnect variability
- - N.V. Licausi
  - James C.-H. Chen
  - et al.
- 2018
- SPIE Advanced Lithography 2018