Sub-40nm V-groove MOSFETs
- J. Appenzeller
- R. Martel
- et al.
- 2001
- DRC 2001
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Technology for the fabrication of ultrashort channel metal–oxide–semiconductor field-effect transistors
- J. Knoch
- J. Appenzeller
- et al.
- 2001
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films