Fundamental study of extreme UV resist line edge roughness: Characterization, experiment, and modeling
- Ramakrishnan Ayothi
- Lovejeet Singh
- et al.
- 2012
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Publications
44 results for Kumar Virwani
Large-scale (512kbit) integration of multilayer-ready access-devices based on Mixed-Ionic-Electronic-Conduction (MIEC) at 100% yield
- G.W. Burr
- K. Virwani
- et al.
- 2012
- VLSI Technology 2012
Observation and modeling of polycrystalline grain formation in Ge 2Sb 2Te 5
- Geoffrey W. Burr
- Pierre Tchoulfian
- et al.
- 2012
- Journal of Applied Physics
Endurance and scaling trends of novel access-devices for multi-layer crosspoint-memory based on mixed-ionic-electronic-conduction (MIEC) materials
- R.S. Shenoy
- K. Gopalakrishnan
- et al.
- 2011
- VLSI Technology 2011
Voltage polarity effects in Ge2Sb2Te 5-based phase change memory devices
- Alvaro Padilla
- Geoffrey W. Burr
- et al.
- 2011
- Journal of Applied Physics
Evidence of crystallization-induced segregation in the phase change material Te-rich GST
- Anthony Debunne
- Kumar Virwani
- et al.
- 2011
- JES
Optimization of porous ultra low- dielectrics (κ≤ 2.55) for 28nm generation
- D. Kioussis
- E.T. Ryan
- et al.
- 2011
- IITC/MAM 2011
Voltage polarity effects in GST-based phase change memory: Physical origins and implications
- A. Padilla
- G.W. Burr
- et al.
- 2010
- IEDM 2010
Highly scalable novel access device based on Mixed Ionic Electronic Conduction (MIEC) materials for high density phase change memory (PCM) arrays
- K. Gopalakrishnan
- R.S. Shenoy
- et al.
- 2010
- VLSI Technology 2010
Self-assembled ferrimagnet-polymer composites for magnetic recording media
- Qiu Dai
- David Berman
- et al.
- 2010
- Nano Letters