Simulation of X-ray mask defect printability
- B.S. Bollepalli
- Scott D. Hector
- et al.
- 1997
- Microlithography 1997
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2 results for Jeff Leavey
ALF: A facility for x-ray lithography
- L. Grant Lesoine
- Kenneth W. Kukkonen
- et al.
- 1990
- Microlithography 1990