Publications

3 results for Lukas Tierney

A BKM by Analytical TEM to Effectively Characterize Electromigration Voids versus Grain Orientations in the Integration and Evaluation of Subtractive Ru BEOL Interconnect
- - Wayne Zhao
  - Yu Zhu
  - et al.
- 2025
- M&M 2025
Monolithic Stacked FET with Stepped Channels for Future Logic Technologies
- - Chen Zhang
  - Seungmin Song
  - et al.
- 2024
- IEDM 2024
Backside power distribution for nanosheet technologies beyond 2nm
- - Ruilong Xie
  - Wonhyuk Hong
  - et al.
- 2024
- VLSI Technology and Circuits 2024