Monolithic Stacked FET with Stepped Channels for Future Logic Technologies
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- Seungmin Song
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- 2024
- IEDM 2024
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Backside power distribution for nanosheet technologies beyond 2nm
- Ruilong Xie
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- 2024
- VLSI Technology and Circuits 2024
Metal Corrosion Mitigation in Fine Geometries during Chemical Mechanical Planarization
- Wei-Tsu Tseng
- Emiko Motoyama
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- 2024
- ECS Spring Meeting 2024