28P L/S Dry Resist Process Flow Co-optimization at Low NA EUV
- Chun-chia Brown Lu
- Saumya Gulati
- et al.
- 2025
- ANS 2025
Publications
2 results for Katherine Luedders
Backside power distribution for nanosheet technologies beyond 2nm
- Ruilong Xie
- Wonhyuk Hong
- et al.
- 2024
- VLSI Technology and Circuits 2024