Electrical characterization of across-field lithographic performance for 256m bit dram technologies
- Junichiro Iba
- Kohji Hashimoto
- et al.
- 1995
- SPIE Photomask Japan 1995
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.