Electromigration and current-carrying implications for aluminum-based metallurgy with tungsten stud-via interconnections
- H.S. Rathore
- R. Filippi
- et al.
- 1992
- SPIE Microelectronic Processing 1992
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Electromigration in a two-level Al-Cu interconnection with W studs
- T. Kwok
- C. Tan
- et al.
- 1990
- VMIC 1990