Acid-catalyzed dehydration for the design of chemical amplification resists
- Hiroshi Ito
- R. Sooriyakumaran
- et al.
- 1991
- ACS Spring 1991
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2 results for Eugene A. Mash
Negative chemical amplification resist systems based on polyhydroxystyrenes and N-substituted imides or aldehydes
- Hiroshi Ito
- Klaas Schildknegt
- et al.
- 1991
- Microlithography 1991