AI-Powered Process Optimization for EUV MOR: Equipment Trace Data Feature Extraction and Machine Learning is Essential for CD Control
- Mario Faria
- Francis Ortega
- et al.
- 2024
- ASMC 2024
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This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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