Publications

2 results for Colleen Meagher

Wet clean oxidation for optimal line width and LER
- - Steven McDermott
  - Keith Donegan
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
The Extreme Extendibility of Cu and Post-Cu Dual Damascene BEOL Interconnect Technology
- - Daniel Edelstein
  - Son Nguyen
  - et al.
- 2024
- IEDM 2024