Publications

2 results for Samuel Munnangi

First Demonstration of 16nm Pitch Subtractive Ru Interconnects for Advanced Technology Nodes
- - C. Penny
  - K. Motoyama
  - et al.
- 2025
- IITC 2025
Evaluation of different metal preclean conditions for MOL for 2nm and beyond: Topic/category: AEPM : nt Processes and Materials
- - Samuel Munnangi
  - Andrew Simon
  - et al.
- 2024
- ASMC 2024