Publications

4 results for Jae Hwan Sim

Effect of Composition Uniformity in the Polymer Chain of EUV Photoresist on Lithographic Performance
- - EuiJin Ko
  - YooRim Jang
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Consideration on segregation behavior of the surface localization material and the pattern roughness degradation in EUV lithography
- - KwangMo Choi
  - YunJi Kim
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Commercialization of Non-PFAS KrF and Development of Non-PFAS EUV Photoresists
- - Cong Liu
  - Joseph Lachowski
  - et al.
- 2025
- SPIE Advanced Lithography 2025
Acid generation efficiency prediction by bond cleavage calculation of EUV photoacid generators
- - Jayoung Koo
  - YunJi Kim
  - et al.
- 2024
- SPIE Advanced Lithography 2024