Radiometric consistency in source specifications for lithography
- Alan E. Rosenbluth
- Jaione Tirapu Azpiroz
- et al.
- 2008
- SPIE Advanced Lithography 2008
Publications
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.
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42 results for Jaione Tirapu Azpiroz
Modeling polarization for Hyper-NA lithography tools and masks
- Kafai Lai
- Alan E. Rosenbluth
- et al.
- 2007
- SPIE Advanced Lithography 2007
Characterization of imaging performance for immersion lithography at NA=0.93
- 2006
- SPIE Advanced Lithography 2006
On-chip Analysis of Fluid Flow for Applications in Carbon Dioxide Trapping
- 2022
- IEEE MDTS 2022
Full scale, microscopically resolved tomographies of sandstone and carbonate rocks augmented by experimental porosity and permeability values
- Matheus Esteves Ferreira
- Mariana Del Grande
- et al.
- 2023
- Scientific Data
Dielectrophoretic microbead sorting using modular electrode design and capillary-driven microfluidics
- Jaione Tirapu-Azpiroz
- Yuksel Temiz
- et al.
- 2017
- Biomedical Microdevices
Modeling fluid transport in two-dimensional paper networks
- Jaione Tirapu-Azpiroz
- Ademir Ferreira Silva
- et al.
- 2018
- J. Micro/Nanolithogr. MEMS MOEMS
Arraying single microbeads in microchannels using dielectrophoresis-assisted mechanical traps
- Jaione Tirapu-Azpiroz
- Yuksel Temiz
- et al.
- 2015
- Applied Physics Letters
Layout optimization method to equalize the best-focus position of different patterns
- Jaione Tirapu-Azpiroz
- Alan E. Rosenbluth
- et al.
- 2014
- J. Micro/Nanolithogr. MEMS MOEMS
Computational lithography: Exhausting the resolution limits of 193-nm projection lithography systems
- David O. S. Melville
- Alan E. Rosenbluth
- et al.
- 2011
- Journal of Vacuum Science and Technology B