Publications

2 results for H. Zhang

Innovations Enabling the Continued Extendibility of Cu and Post-Cu Damascene BEOL Technologies
- - D. Edelstein
  - A. Jog
  - et al.
- 2025
- IITC 2025
First Demonstration of 16nm Pitch Subtractive Ru Interconnects for Advanced Technology Nodes
- - C. Penny
  - K. Motoyama
  - et al.
- 2025
- IITC 2025