Publications

203 results for Christian Lavoie

Dependence of crystallographic texture of C54 TiSi₂ on thickness and linewidth in submicron CMOS structures
- - V. Svilan
  - K.P. Rodbell
  - et al.
- 1996
- MRS Spring Meeting 1996
Light scattering measurement of surface topography during formation of titanium silicide
- - C. Lavoie
  - C. Cabral Jr.
  - et al.
- 1995
- MRS Fall Meeting 1995
In situ analysis of the formation of thin TiSi₂ (<50 nm) contacts in submicron CMOS structures during rapid thermal annealing
- - L. Clevenger
  - C. Cabral Jr.
  - et al.
- 1995
- MRS Fall Meeting 1995