Publications

This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.

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22 results for Dominik Metzler

Fluorocarbon assisted atomic layer etching of SiO₂ using cyclic Ar/C₄F₈ plasma
- - Dominik Metzler
  - Robert L. Bruce
  - et al.
- 2013
- JVSTA
Characterization and mechanism of He plasma pretreatment of nanoscale polymer masks for improved pattern transfer fidelity
- - Florian Weilnboeck
  - D. Metzler
  - et al.
- 2011
- Applied Physics Letters