Publications

3 results for Donald Canaperi

NanoStack Transistor Architecture for CMOS 7A Node and Beyond
- - Shay Reboh
  - Chen Zhang
  - et al.
- 2025
- VLSI Technology and Circuits 2025
Metal Corrosion Mitigation in Fine Geometries during Chemical Mechanical Planarization
- - Wei-Tsu Tseng
  - Emiko Motoyama
  - et al.
- 2024
- ECS Spring Meeting 2024
Flowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
- - Son Nguyen
  - Thomas Haigh
  - et al.
- 2022
- MRS Fall Meeting 2022