Flowable Chemical Vapor Deposition of Lightly Porous Low k SiCOH Dielectrics—Remote Plasma Deposition Processing, Film Analysis and Gap-Fill Application in Nano Device Fabrication
- Son Nguyen
- Thomas Haigh
- et al.
- 2022
- MRS Fall Meeting 2022
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Metal Corrosion Mitigation in Fine Geometries during Chemical Mechanical Planarization
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- 2024
- ECS Spring Meeting 2024
Post Tungsten CMP Cleaning: Optimization for Cleaning Efficiency and Corrosion Reduction
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- ECS J. Solid State Sci. Technol.