Publications

10 results for Genevieve Beique

Introduction of pre-etch deposition techniques in EUV patterning
- - Xun Xiang
  - Genevieve Beique
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Planarity considerations in SADP for advanced BEOL patterning
- - James H.-C. Chen
  - Terry A. Spooner
  - et al.
- 2017
- IITC 2017
Single-expose patterning development for EUV lithography
- - Anuja De Silva
  - Karen Petrillo
  - et al.
- 2017
- SPIE Advanced Lithography 2017
BEOL process integration for the 7 nm technology node
- - T. Standaert
  - Genevieve Beique
  - et al.
- 2016
- IITC/AMC 2016
Plasma etch patterning of EUV lithography: Balancing roughness and selectivity trade off
- - Sebastian U. Engelmann
  - Qinghuang Lin
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Comparison of left and right side line edge roughness in lithography
- - Lei Sun
  - Nicole Saulnier
  - et al.
- 2016
- SPIE Advanced Lithography 2016
EUV patterning successes and frontiers
- - Nelson Felix
  - Daniel Corliss
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Trench and hole patterning with EUV resists using dual frequency capacitively coupled plasma (CCP)
- - Yannick Feurprier
  - Katie Lutker-Lee
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Plasma etch challenges with new EUV lithography material introduction for patterning for MOL and BEOL
- - Changwoo Lee
  - Bhaskar Nagabhirava
  - et al.
- 2015
- SPIE Advanced Lithography 2015
EUV processing and characterization for BEOL
- - Nicole Saulnier
  - Yongan Xu
  - et al.
- 2015
- SPIE Advanced Lithography 2015