Publications

8 results for Lei Sun

Introduction of pre-etch deposition techniques in EUV patterning
- - Xun Xiang
  - Genevieve Beique
  - et al.
- 2018
- SPIE Advanced Lithography 2018
Single-expose patterning development for EUV lithography
- - Anuja De Silva
  - Karen Petrillo
  - et al.
- 2017
- SPIE Advanced Lithography 2017
A 7nm FinFET technology featuring EUV patterning and dual strained high mobility channels
- - Ruilong Xie
  - Pietro Montanini
  - et al.
- 2016
- IEDM 2016
Plasma etch patterning of EUV lithography: Balancing roughness and selectivity trade off
- - Sebastian U. Engelmann
  - Qinghuang Lin
  - et al.
- 2016
- SPIE Advanced Lithography 2016
Comparison of left and right side line edge roughness in lithography
- - Lei Sun
  - Nicole Saulnier
  - et al.
- 2016
- SPIE Advanced Lithography 2016
EUV patterning successes and frontiers
- - Nelson Felix
  - Daniel Corliss
  - et al.
- 2016
- SPIE Advanced Lithography 2016
EUV processing and characterization for BEOL
- - Nicole Saulnier
  - Yongan Xu
  - et al.
- 2015
- SPIE Advanced Lithography 2015
Clear sub-resolution assist features for EUV
- - Martin Burkhardt
  - Greg McIntyre
  - et al.
- 2014
- SPIE Advanced Lithography 2014