Phase formation and texture of nickel silicides on Si1-xC x epilayers
- K. De Keyser
- B. De Schutter
- et al.
- 2011
- Microelectronic Engineering
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52 results for C. Detavernier
Texture of CoSi2 films on Si(111), (110) and (001) substrates
- K. De Keyser
- C. Detavernier
- et al.
- 2010
- Thin Solid Films
Phase formation and stability of Ni silicide contacts - Scaling to ultra-thin films
- C. Detavernier
- K. De Keyser
- et al.
- 2010
- ICSICT 2010
Phase formation and thermal stability of ultrathin nickel-silicides on Si(100)
- K. De Keyser
- C. Van Bockstael
- et al.
- 2010
- Applied Physics Letters
Texture of cobalt germanides on Ge(100) and Ge(111) and its influence on the formation temperature
- K. De Keyser
- R.L. Van Meirhaeghe
- et al.
- 2010
- JES
In situ study of the formation of silicide phases in amorphous Co-Si mixed layers
- C. Van Bockstael
- K. De Keyser
- et al.
- 2010
- Microelectronic Engineering
In situ X-ray diffraction study of thin film Ir/Si solid state reactions
- W. Knaepen
- J. Demeulemeester
- et al.
- 2010
- Microelectronic Engineering
In situ x-ray diffraction study of Ni-Yb interlayer and alloy systems on Si(100)
- W. Knaepen
- J. Demeulemeester
- et al.
- 2009
- JVSTA
In situ study of the formation of silicide phases in amorphous Ni-Si mixed layers
- C. Van Bockstael
- C. Detavernier
- et al.
- 2009
- Journal of Applied Physics
In situ x-ray diffraction study of metal induced crystallization of amorphous germanium
- W. Knaepen
- S. Gaudet
- et al.
- 2009
- Journal of Applied Physics