Metal-containing release layers for use with UV-cure nanoimprint lithographic template materials
- F.A. Houle
- S. Raoux
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
This is our catalog of publications authored by IBM researchers, in collaboration with the global research community. It’s an ever-growing body of work that shows why IBM is one of the most important contributors to modern computing.